MLchartDataset catalogue

Emergency off

Term · Semiconductors · MLC-T-SEM-000112

A safety function that immediately deactivates all power to a piece of equipment or an entire system in a semiconductor fabrication facility. This action prevents injury to personnel or damage to expensive tools and materials during an abnormal event. EMO systems are typically activated by clearly marked buttons or sensors detecting hazardous conditions.

Table 1. Record
IdentifierMLC-T-SEM-000112
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
AbbreviationEMO
Record as JSON 
{
  "id": "MLC-T-SEM-000112",
  "term": "Emergency off",
  "field": "Semiconductors",
  "definition": "A safety function that immediately deactivates all power to a piece of equipment or an entire system in a semiconductor fabrication facility. This action prevents injury to personnel or damage to expensive tools and materials during an abnormal event. EMO systems are typically activated by clearly marked buttons or sensors detecting hazardous conditions.",
  "abbreviation": "EMO",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/emergency-off/"
}

Record 109 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.