Purge

{
  "id": "MLC-T-SEM-000273",
  "term": "Purge",
  "field": "Semiconductors",
  "definition": "To displace an unwanted gas from a process chamber, vacuum system, or gas delivery line by flowing an inert gas, such as nitrogen or argon, through it. This action removes residual reactive gases, moisture, or air before introducing process chemicals or after a process is complete. A purge cycle often involves repeatedly pressurizing the volume with inert gas and evacuating it to a vacuum pump to dilute contaminants to an acceptable level.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/purge/"
}