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Specialty gas

Term · Semiconductors · MLC-T-SEM-000314

Any high-purity gas or gas mixture, other than bulk gases like nitrogen or oxygen, used in semiconductor manufacturing for specific process steps. These gases can be inert, flammable, corrosive, or toxic and are employed in deposition, etching, doping, and chamber cleaning. Examples include silane (SiH4) for silicon deposition, boron trifluoride (BF3) for doping, and nitrogen trifluoride (NF3) for plasma chamber cleaning.

Table 1. Record
IdentifierMLC-T-SEM-000314
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000314",
  "term": "Specialty gas",
  "field": "Semiconductors",
  "definition": "Any high-purity gas or gas mixture, other than bulk gases like nitrogen or oxygen, used in semiconductor manufacturing for specific process steps. These gases can be inert, flammable, corrosive, or toxic and are employed in deposition, etching, doping, and chamber cleaning. Examples include silane (SiH4) for silicon deposition, boron trifluoride (BF3) for doping, and nitrogen trifluoride (NF3) for plasma chamber cleaning.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/specialty-gas/"
}

Record 328 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.