MLchartDataset catalogue

Arsine

Term · Semiconductors · MLC-T-SEM-000026

A highly toxic and flammable gas with the chemical formula AsH3, used as a dopant source in semiconductor manufacturing, particularly for n-type doping of silicon and gallium arsenide. It is a colorless gas with a garlic-like odor, though its odor threshold is above hazardous concentrations. Due to its extreme toxicity, strict safety protocols and monitoring systems are required for its handling.

Table 1. Record
IdentifierMLC-T-SEM-000026
FieldSemiconductors
SubjectCleanroom, Contamination & EHS
Record as JSON 
{
  "id": "MLC-T-SEM-000026",
  "term": "Arsine",
  "field": "Semiconductors",
  "definition": "A highly toxic and flammable gas with the chemical formula AsH3, used as a dopant source in semiconductor manufacturing, particularly for n-type doping of silicon and gallium arsenide. It is a colorless gas with a garlic-like odor, though its odor threshold is above hazardous concentrations. Due to its extreme toxicity, strict safety protocols and monitoring systems are required for its handling.",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/arsine/"
}

Record 18 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.