MLchartDataset catalogue

Silane

Term · Semiconductors · MLC-T-SEM-000308

A colorless, pyrophoric gas with the chemical formula SiH4, widely used in semiconductor manufacturing as a precursor for depositing silicon-containing films, such as silicon dioxide, silicon nitride, and amorphous silicon. It readily decomposes at elevated temperatures to form silicon. Due to its pyrophoric nature, extreme caution and specialized gas delivery systems are required for its safe handling.

Table 1. Record
IdentifierMLC-T-SEM-000308
FieldSemiconductors
SubjectCleanroom, Contamination & EHS
Record as JSON 
{
  "id": "MLC-T-SEM-000308",
  "term": "Silane",
  "field": "Semiconductors",
  "definition": "A colorless, pyrophoric gas with the chemical formula SiH4, widely used in semiconductor manufacturing as a precursor for depositing silicon-containing films, such as silicon dioxide, silicon nitride, and amorphous silicon. It readily decomposes at elevated temperatures to form silicon. Due to its pyrophoric nature, extreme caution and specialized gas delivery systems are required for its safe handling.",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/silane/"
}

Record 321 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.