MLchartDataset catalogue

Sub-fab

Term · Semiconductors · MLC-T-SEM-000323

The support level of a semiconductor fabrication plant located directly beneath the main cleanroom floor. This area houses the pumps, power supplies, gas cabinets, chemical delivery systems, and other utility equipment required to operate the manufacturing tools on the cleanroom level above. The sub-fab's layout is designed to provide service access to the tools from below without requiring entry into the cleanroom environment.

Table 1. Record
IdentifierMLC-T-SEM-000323
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000323",
  "term": "Sub-fab",
  "field": "Semiconductors",
  "definition": "The support level of a semiconductor fabrication plant located directly beneath the main cleanroom floor. This area houses the pumps, power supplies, gas cabinets, chemical delivery systems, and other utility equipment required to operate the manufacturing tools on the cleanroom level above. The sub-fab's layout is designed to provide service access to the tools from below without requiring entry into the cleanroom environment.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/sub-fab/"
}

Record 339 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.