Heating, ventilation and air conditioning

{
  "id": "MLC-T-SEM-000156",
  "term": "Heating, ventilation and air conditioning",
  "field": "Semiconductors",
  "definition": "The systems that control temperature, humidity, airflow, and air purity throughout a semiconductor fab, supplying filtered conditioned air to the cleanroom and removing heat from the process tools. General cleanroom areas commonly hold temperature near 21 °C within about ±1 °C and relative humidity within about ±5%, while lithography bays are held tighter, to about ±0.1 °C.",
  "abbreviation": "HVAC",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/heating-ventilation-and-air-conditioning/"
}