MLchartDataset catalogue

Helium leak test

Term · Semiconductors · MLC-T-SEM-000157

A method used to detect and locate leaks in vacuum systems or sealed components by introducing helium gas as a tracer. A mass spectrometer leak detector then measures the presence of helium that has permeated through any leaks. This test can identify leaks as small as 10^-10 standard cubic centimeters per second.

Table 1. Record
IdentifierMLC-T-SEM-000157
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000157",
  "term": "Helium leak test",
  "field": "Semiconductors",
  "definition": "A method used to detect and locate leaks in vacuum systems or sealed components by introducing helium gas as a tracer. A mass spectrometer leak detector then measures the presence of helium that has permeated through any leaks. This test can identify leaks as small as 10^-10 standard cubic centimeters per second.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/helium-leak-test/"
}

Record 158 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.