MLchartDataset catalogue

Darkfield

Term · Semiconductors · MLC-T-SEM-000081

An optical inspection technique where a semiconductor wafer is illuminated at an oblique angle, and only light scattered by defects is collected by the detector. The background appears dark, making defects stand out brightly. This method is particularly sensitive to small particles and surface irregularities that might be difficult to detect with brightfield illumination.

Table 1. Record
IdentifierMLC-T-SEM-000081
FieldSemiconductors
SubjectMetrology, Inspection & Yield
Record as JSON 
{
  "id": "MLC-T-SEM-000081",
  "term": "Darkfield",
  "field": "Semiconductors",
  "definition": "An optical inspection technique where a semiconductor wafer is illuminated at an oblique angle, and only light scattered by defects is collected by the detector. The background appears dark, making defects stand out brightly. This method is particularly sensitive to small particles and surface irregularities that might be difficult to detect with brightfield illumination.",
  "subject": "Metrology, Inspection & Yield",
  "url": "https://mlchart.com/terminology/semiconductors/darkfield/"
}

Record 76 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.