MLchartDataset catalogue

Defect density

Term · Semiconductors · MLC-T-SEM-000086

The number of defects per unit area on a semiconductor wafer, a primary metric for manufacturing process health and yield prediction. It is calculated by dividing the total count of defects, identified by inspection tools, by the surface area inspected. Defect density is expressed as defects per square centimeter (defects/cm²), and values for a mature, high-volume process are typically well below 0.1 defects/cm².

Table 1. Record
IdentifierMLC-T-SEM-000086
FieldSemiconductors
SubjectMetrology, Inspection & Yield
Record as JSON 
{
  "id": "MLC-T-SEM-000086",
  "term": "Defect density",
  "field": "Semiconductors",
  "definition": "The number of defects per unit area on a semiconductor wafer, a primary metric for manufacturing process health and yield prediction. It is calculated by dividing the total count of defects, identified by inspection tools, by the surface area inspected. Defect density is expressed as defects per square centimeter (defects/cm²), and values for a mature, high-volume process are typically well below 0.1 defects/cm².",
  "subject": "Metrology, Inspection & Yield",
  "url": "https://mlchart.com/terminology/semiconductors/defect-density/"
}

Record 81 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.