Dose

{
  "id": "MLC-T-SEM-000100",
  "term": "Dose",
  "field": "Semiconductors",
  "definition": "The amount of exposure energy delivered per unit area to a photoresist during a lithography process. It directly controls the chemical reaction within the resist, determining whether the material becomes soluble or insoluble in the developer solution. Dose is measured in units like millijoules per square centimeter (mJ/cm²) for photolithography or microcoulombs per square centimeter (μC/cm²) for electron-beam lithography.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/dose/"
}