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Photolithography

Term · Semiconductors · MLC-T-SEM-000246

A fundamental patterning process in semiconductor manufacturing that uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical photoresist on a substrate. This technique involves exposing the resist through the mask, followed by development to selectively remove exposed or unexposed areas. Photolithography is repeated multiple times to build up complex integrated circuit structures layer by layer.

Table 1. Record
IdentifierMLC-T-SEM-000246
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000246",
  "term": "Photolithography",
  "field": "Semiconductors",
  "definition": "A fundamental patterning process in semiconductor manufacturing that uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical photoresist on a substrate. This technique involves exposing the resist through the mask, followed by development to selectively remove exposed or unexposed areas. Photolithography is repeated multiple times to build up complex integrated circuit structures layer by layer.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/photolithography/"
}

Record 255 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.