MLchartDataset catalogue

Stepper

Term · Semiconductors · MLC-T-SEM-000387

A type of photolithography tool used in semiconductor manufacturing to transfer patterns from a photomask onto a semiconductor wafer. It works by exposing a small area (a 'field') of the wafer at a time, then stepping to an adjacent field and repeating the exposure process until the entire wafer is patterned. Steppers use a reduction lens system to project a demagnified image of the mask pattern onto the wafer, offering high resolution and overlay accuracy.

Table 1. Record
IdentifierMLC-T-SEM-000387
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000387",
  "term": "Stepper",
  "field": "Semiconductors",
  "definition": "A type of photolithography tool used in semiconductor manufacturing to transfer patterns from a photomask onto a semiconductor wafer. It works by exposing a small area (a 'field') of the wafer at a time, then stepping to an adjacent field and repeating the exposure process until the entire wafer is patterned. Steppers use a reduction lens system to project a demagnified image of the mask pattern onto the wafer, offering high resolution and overlay accuracy.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/stepper/"
}

Record 337 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.