Pellicle

{
  "id": "MLC-T-SEM-000382",
  "term": "Pellicle",
  "field": "Semiconductors",
  "definition": "A thin, transparent membrane stretched over a frame and attached to a photomask, creating a small air gap between the membrane and the mask surface. Its purpose is to prevent airborne particles from settling directly onto the patterned surface of the mask, which would otherwise be printed onto the wafer during lithography. Particles landing on the pellicle are out of the focal plane of the stepper or scanner, thus not affecting the printed pattern.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/pellicle/"
}