MLchartDataset catalogue

Perfluorinated compounds

Term · Semiconductors · MLC-T-SEM-000242

A group of synthetic organic compounds characterized by carbon chains fully saturated with fluorine atoms, making them extremely stable and persistent in the environment. In semiconductor manufacturing, PFCs such as CF4, C2F6, and SF6 are used in plasma etching and chamber cleaning processes. These compounds are potent greenhouse gases with very high global warming potentials and long atmospheric lifetimes.

Table 1. Record
IdentifierMLC-T-SEM-000242
FieldSemiconductors
SubjectSustainability & Energy
AbbreviationPFC
Record as JSON 
{
  "id": "MLC-T-SEM-000242",
  "term": "Perfluorinated compounds",
  "field": "Semiconductors",
  "definition": "A group of synthetic organic compounds characterized by carbon chains fully saturated with fluorine atoms, making them extremely stable and persistent in the environment. In semiconductor manufacturing, PFCs such as CF4, C2F6, and SF6 are used in plasma etching and chamber cleaning processes. These compounds are potent greenhouse gases with very high global warming potentials and long atmospheric lifetimes.",
  "abbreviation": "PFC",
  "subject": "Sustainability & Energy",
  "url": "https://mlchart.com/terminology/semiconductors/perfluorinated-compounds/"
}

Record 251 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.