MLchartDataset catalogue

Load lock

Term · Semiconductors · MLC-T-SEM-000201

A small, intermediate vacuum chamber used in semiconductor processing equipment to transfer wafers between an atmospheric or less-vacuum environment and a high-vacuum process chamber. It allows the main process chamber to remain under high vacuum, preventing contamination and reducing pump-down times. Wafers are loaded into the load lock, which is then pumped down before opening to the process chamber.

Table 1. Record
IdentifierMLC-T-SEM-000201
FieldSemiconductors
SubjectEquipment & Automation
Record as JSON 
{
  "id": "MLC-T-SEM-000201",
  "term": "Load lock",
  "field": "Semiconductors",
  "definition": "A small, intermediate vacuum chamber used in semiconductor processing equipment to transfer wafers between an atmospheric or less-vacuum environment and a high-vacuum process chamber. It allows the main process chamber to remain under high vacuum, preventing contamination and reducing pump-down times. Wafers are loaded into the load lock, which is then pumped down before opening to the process chamber.",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/load-lock/"
}

Record 206 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.