MLchartDataset catalogue

Automated material handling system

Term · Semiconductors · MLC-T-SEM-000030

A robotic system designed to transport semiconductor wafers and other materials between processing tools within a fabrication facility. These systems reduce human intervention, minimizing contamination and improving efficiency in cleanroom environments. They typically consist of overhead tracks, vehicles, and specialized load ports for interfacing with equipment.

Table 1. Record
IdentifierMLC-T-SEM-000030
FieldSemiconductors
SubjectEquipment & Automation
AbbreviationAMHS
Record as JSON 
{
  "id": "MLC-T-SEM-000030",
  "term": "Automated material handling system",
  "field": "Semiconductors",
  "definition": "A robotic system designed to transport semiconductor wafers and other materials between processing tools within a fabrication facility. These systems reduce human intervention, minimizing contamination and improving efficiency in cleanroom environments. They typically consist of overhead tracks, vehicles, and specialized load ports for interfacing with equipment.",
  "abbreviation": "AMHS",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/automated-material-handling-system/"
}

Record 22 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.