MLchartDataset catalogue

AGV

Term · Semiconductors · MLC-T-SEM-000016

An automated guided vehicle, or AGV, that transports materials such as wafer cassettes (FOUPs) and reticle pods between processing tools, stockers, and metrology stations within a semiconductor fabrication plant. These robotic vehicles navigate along predefined paths using guidance systems like magnetic tape, optical sensors, or lasers. AGVs are a key component of a fab's automated material handling system (AMHS), which manages the logistics of all work-in-process.

Table 1. Record
IdentifierMLC-T-SEM-000016
FieldSemiconductors
SubjectSmart Manufacturing & AI
Record as JSON 
{
  "id": "MLC-T-SEM-000016",
  "term": "AGV",
  "field": "Semiconductors",
  "definition": "An automated guided vehicle, or AGV, that transports materials such as wafer cassettes (FOUPs) and reticle pods between processing tools, stockers, and metrology stations within a semiconductor fabrication plant. These robotic vehicles navigate along predefined paths using guidance systems like magnetic tape, optical sensors, or lasers. AGVs are a key component of a fab's automated material handling system (AMHS), which manages the logistics of all work-in-process.",
  "subject": "Smart Manufacturing & AI",
  "url": "https://mlchart.com/terminology/semiconductors/agv/"
}

Record 8 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.