MLchartDataset catalogue

Overhead hoist transport

Term · Semiconductors · MLC-T-SEM-000238

An automated material handling system used in semiconductor fabrication plants to move wafer carriers, such as Front Opening Unified Pods (FOUPs), between processing tools. These systems consist of a network of tracks mounted on the ceiling, along which robotic vehicles travel. OHT systems reduce human intervention and contamination risks in cleanroom environments.

Table 1. Record
IdentifierMLC-T-SEM-000238
FieldSemiconductors
SubjectEquipment & Automation
AbbreviationOHT
Record as JSON 
{
  "id": "MLC-T-SEM-000238",
  "term": "Overhead hoist transport",
  "field": "Semiconductors",
  "definition": "An automated material handling system used in semiconductor fabrication plants to move wafer carriers, such as Front Opening Unified Pods (FOUPs), between processing tools. These systems consist of a network of tracks mounted on the ceiling, along which robotic vehicles travel. OHT systems reduce human intervention and contamination risks in cleanroom environments.",
  "abbreviation": "OHT",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/overhead-hoist-transport/"
}

Record 245 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.