MLchartDataset catalogue

Front opening unified pod

Term · Semiconductors · MLC-T-SEM-000143

A standardized plastic enclosure designed to hold multiple silicon wafers securely during transport and processing within a semiconductor fabrication facility. It protects the wafers from contamination and physical damage in a controlled environment. FOUPs are typically handled by automated material handling systems and can hold 13 or 25 wafers.

Table 1. Record
IdentifierMLC-T-SEM-000143
FieldSemiconductors
SubjectEquipment & Automation
AbbreviationFOUP
Record as JSON 
{
  "id": "MLC-T-SEM-000143",
  "term": "Front opening unified pod",
  "field": "Semiconductors",
  "definition": "A standardized plastic enclosure designed to hold multiple silicon wafers securely during transport and processing within a semiconductor fabrication facility. It protects the wafers from contamination and physical damage in a controlled environment. FOUPs are typically handled by automated material handling systems and can hold 13 or 25 wafers.",
  "abbreviation": "FOUP",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/front-opening-unified-pod/"
}

Record 142 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.