Standard mechanical interface
Term · Semiconductors · MLC-T-SEM-000386
A standardized port on semiconductor processing equipment that allows for automated, contamination-free transfer of wafers from a front-opening unified pod (FOUP) or other wafer carriers. This interface mechanically docks with the carrier, creating a sealed environment for wafer exchange. The SMIF standard defines the physical dimensions and operational protocols for this automated material handling.
| Identifier | MLC-T-SEM-000386 |
|---|---|
| Field | Semiconductors |
| Subject | Equipment & Automation |
| Abbreviation | SMIF |
Record as JSON
{
"id": "MLC-T-SEM-000386",
"term": "Standard mechanical interface",
"field": "Semiconductors",
"definition": "A standardized port on semiconductor processing equipment that allows for automated, contamination-free transfer of wafers from a front-opening unified pod (FOUP) or other wafer carriers. This interface mechanically docks with the carrier, creating a sealed environment for wafer exchange. The SMIF standard defines the physical dimensions and operational protocols for this automated material handling.",
"abbreviation": "SMIF",
"subject": "Equipment & Automation",
"url": "https://mlchart.com/terminology/semiconductors/standard-mechanical-interface/"
}
Record 333 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.