Atomic force microscope

{
  "id": "MLC-T-SEM-000029",
  "term": "Atomic force microscope",
  "field": "Semiconductors",
  "definition": "A high-resolution scanning probe microscope used to image and measure surface topography at the nanoscale. It operates by scanning a sharp tip attached to a cantilever across a surface and detecting deflections caused by interatomic forces. AFM provides three-dimensional surface profiles and can be used to characterize roughness, grain size, and defects on semiconductor materials.",
  "abbreviation": "AFM",
  "subject": "Metrology, Inspection & Yield",
  "url": "https://mlchart.com/terminology/semiconductors/atomic-force-microscope/"
}