Scanning electron microscope

{
  "id": "MLC-T-SEM-000294",
  "term": "Scanning electron microscope",
  "field": "Semiconductors",
  "definition": "An imaging instrument that creates high-magnification images by directing a finely focused electron beam across a sample's surface. The interaction of the beam with the sample generates secondary electrons, backscattered electrons, and X-rays, which are collected by detectors to form an image of the surface topography and composition. A Scanning electron microscope (SEM) is a standard tool for process control, defect review, and failure analysis in semiconductor manufacturing.",
  "abbreviation": "SEM",
  "subject": "Metrology, Inspection & Yield",
  "url": "https://mlchart.com/terminology/semiconductors/scanning-electron-microscope/"
}