X-ray fluorescence
Term · Semiconductors · MLC-T-SEM-000365
A non-destructive analytical technique used to determine the elemental composition of materials. It involves exciting a sample with X-rays, causing the atoms to emit characteristic secondary X-rays, or fluorescent X-rays. The energy and intensity of these emitted X-rays are then measured to identify and quantify the elements present, typically from sodium to uranium.
| Identifier | MLC-T-SEM-000365 |
|---|---|
| Field | Semiconductors |
| Subject | Metrology, Inspection & Yield |
| Abbreviation | XRF |
Record as JSON
{
"id": "MLC-T-SEM-000365",
"term": "X-ray fluorescence",
"field": "Semiconductors",
"definition": "A non-destructive analytical technique used to determine the elemental composition of materials. It involves exciting a sample with X-rays, causing the atoms to emit characteristic secondary X-rays, or fluorescent X-rays. The energy and intensity of these emitted X-rays are then measured to identify and quantify the elements present, typically from sodium to uranium.",
"abbreviation": "XRF",
"subject": "Metrology, Inspection & Yield",
"url": "https://mlchart.com/terminology/semiconductors/x-ray-fluorescence/"
}
Record 386 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.