Excursion

{
  "id": "MLC-T-SEM-000123",
  "term": "Excursion",
  "field": "Semiconductors",
  "definition": "A deviation of a manufacturing process parameter or product characteristic beyond its established control limits or specifications. Such an event indicates that the process is operating outside its normal or desired range, potentially leading to non-conforming material. Excursions necessitate investigation and corrective action to restore process stability.",
  "subject": "Metrology, Inspection & Yield",
  "url": "https://mlchart.com/terminology/semiconductors/excursion/"
}