Scanner

{
  "id": "MLC-T-SEM-000293",
  "term": "Scanner",
  "field": "Semiconductors",
  "definition": "A type of lithography tool that projects a pattern from a reticle onto a semiconductor wafer by synchronously moving both the reticle and the wafer through a narrow illumination slit. This scanning motion allows for larger exposure fields than a stepper, covering the entire wafer surface with the desired circuit design. Modern scanners often use deep ultraviolet (DUV) light sources, such as excimer lasers, for high-resolution patterning.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/scanner/"
}