Depth of focus

{
  "id": "MLC-T-SEM-000089",
  "term": "Depth of focus",
  "field": "Semiconductors",
  "definition": "The range of vertical distance over which a lithography system can maintain acceptable image quality and resolution on a semiconductor wafer. A larger depth of focus allows for greater tolerance to variations in wafer topography and flatness during exposure. This parameter is inversely related to the numerical aperture and directly related to the wavelength of the exposure light.",
  "abbreviation": "DoF",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/depth-of-focus/"
}