MLchartDataset catalogue

Field

Term · Semiconductors · MLC-T-SEM-000132

The area on a semiconductor wafer that is exposed by a single projection of the photomask pattern during lithography. This region typically contains multiple identical integrated circuit dies or a portion of a larger circuit. The entire wafer is patterned by stepping and repeating the exposure field across its surface.

Table 1. Record
IdentifierMLC-T-SEM-000132
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000132",
  "term": "Field",
  "field": "Semiconductors",
  "definition": "The area on a semiconductor wafer that is exposed by a single projection of the photomask pattern during lithography. This region typically contains multiple identical integrated circuit dies or a portion of a larger circuit. The entire wafer is patterned by stepping and repeating the exposure field across its surface.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/field/"
}

Record 131 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.