Seasoning

{
  "id": "MLC-T-SEM-000384",
  "term": "Seasoning",
  "field": "Semiconductors",
  "definition": "The process of coating the internal surfaces of a new or recently cleaned process chamber with a thin layer of material before processing production wafers. This conditioning step creates a stable and repeatable environment by covering chamber walls with the same byproducts that will be generated during the actual process. A seasoning recipe may run for several minutes to hours, depending on the specific process and chamber condition.",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/seasoning/"
}