Run card
Term · Semiconductors · MLC-T-SEM-000288
A physical or digital document that accompanies a wafer lot through the semiconductor manufacturing process, detailing the sequence of operations, equipment to be used, and specific process parameters for each step. It serves as a traveler, recording actual process conditions, operator initials, and any deviations or observations. This document provides a historical record for traceability and quality control.
| Identifier | MLC-T-SEM-000288 |
|---|---|
| Field | Semiconductors |
| Subject | Front-End Process |
Record as JSON
{
"id": "MLC-T-SEM-000288",
"term": "Run card",
"field": "Semiconductors",
"definition": "A physical or digital document that accompanies a wafer lot through the semiconductor manufacturing process, detailing the sequence of operations, equipment to be used, and specific process parameters for each step. It serves as a traveler, recording actual process conditions, operator initials, and any deviations or observations. This document provides a historical record for traceability and quality control.",
"subject": "Front-End Process",
"url": "https://mlchart.com/terminology/semiconductors/run-card/"
}
Record 298 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.