MLchartDataset catalogue

Virtual metrology

Term · Semiconductors · MLC-T-SEM-000348

A technique for predicting the physical properties of a wafer after a manufacturing process step without performing a direct physical measurement. It uses statistical or machine learning models that correlate data from process equipment sensors (like temperature, pressure, and gas flow) with actual metrology results from a subset of wafers. The resulting model then provides an estimated measurement for every wafer that runs through the tool, increasing the effective measurement density.

Table 1. Record
IdentifierMLC-T-SEM-000348
FieldSemiconductors
SubjectMetrology, Inspection & Yield
Record as JSON 
{
  "id": "MLC-T-SEM-000348",
  "term": "Virtual metrology",
  "field": "Semiconductors",
  "definition": "A technique for predicting the physical properties of a wafer after a manufacturing process step without performing a direct physical measurement. It uses statistical or machine learning models that correlate data from process equipment sensors (like temperature, pressure, and gas flow) with actual metrology results from a subset of wafers. The resulting model then provides an estimated measurement for every wafer that runs through the tool, increasing the effective measurement density.",
  "subject": "Metrology, Inspection & Yield",
  "url": "https://mlchart.com/terminology/semiconductors/virtual-metrology/"
}

Record 367 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.