MLchartDataset catalogue

Anomaly detection

Term · Semiconductors · MLC-T-SEM-000024

The process of identifying items, events, or observations which do not conform to an expected pattern or other items in a dataset. In semiconductor fabrication, it is applied to sensor data from process tools, wafer inspection images, and test results to flag potential equipment malfunctions or yield-impacting process deviations. Statistical methods like control charts or machine learning algorithms like autoencoders are common techniques for this purpose.

Table 1. Record
IdentifierMLC-T-SEM-000024
FieldSemiconductors
SubjectSmart Manufacturing & AI
Record as JSON 
{
  "id": "MLC-T-SEM-000024",
  "term": "Anomaly detection",
  "field": "Semiconductors",
  "definition": "The process of identifying items, events, or observations which do not conform to an expected pattern or other items in a dataset. In semiconductor fabrication, it is applied to sensor data from process tools, wafer inspection images, and test results to flag potential equipment malfunctions or yield-impacting process deviations. Statistical methods like control charts or machine learning algorithms like autoencoders are common techniques for this purpose.",
  "subject": "Smart Manufacturing & AI",
  "url": "https://mlchart.com/terminology/semiconductors/anomaly-detection/"
}

Record 16 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.