MLchartDataset catalogue

Advanced process control

Term · Semiconductors · MLC-T-SEM-000014

A framework of methods and technologies, known as APC, used in semiconductor manufacturing to maintain process performance at a target level with minimal variability. APC systems use real-time measurements from metrology tools and equipment sensors to automatically adjust process parameters for subsequent runs or lots. This framework includes techniques such as run-to-run control, statistical process control (SPC), and fault detection and classification (FDC).

Table 1. Record
IdentifierMLC-T-SEM-000014
FieldSemiconductors
SubjectSmart Manufacturing & AI
AbbreviationAPC
Record as JSON 
{
  "id": "MLC-T-SEM-000014",
  "term": "Advanced process control",
  "field": "Semiconductors",
  "definition": "A framework of methods and technologies, known as APC, used in semiconductor manufacturing to maintain process performance at a target level with minimal variability. APC systems use real-time measurements from metrology tools and equipment sensors to automatically adjust process parameters for subsequent runs or lots. This framework includes techniques such as run-to-run control, statistical process control (SPC), and fault detection and classification (FDC).",
  "abbreviation": "APC",
  "subject": "Smart Manufacturing & AI",
  "url": "https://mlchart.com/terminology/semiconductors/advanced-process-control/"
}

Record 6 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.