MLchartDataset catalogue

RF generator

Term · Semiconductors · MLC-T-SEM-000287

An electronic power supply that produces high-frequency alternating current in the radio frequency (RF) spectrum, used to create and sustain plasma in process chambers. It converts standard AC line power into a stable, high-power RF signal at a precise frequency, such as 13.56 MHz. The generator is connected to an RF match network, which adjusts the impedance to efficiently transfer power to the plasma for processes like etching and deposition.

Table 1. Record
IdentifierMLC-T-SEM-000287
FieldSemiconductors
SubjectEquipment & Automation
Record as JSON 
{
  "id": "MLC-T-SEM-000287",
  "term": "RF generator",
  "field": "Semiconductors",
  "definition": "An electronic power supply that produces high-frequency alternating current in the radio frequency (RF) spectrum, used to create and sustain plasma in process chambers. It converts standard AC line power into a stable, high-power RF signal at a precise frequency, such as 13.56 MHz. The generator is connected to an RF match network, which adjusts the impedance to efficiently transfer power to the plasma for processes like etching and deposition.",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/rf-generator/"
}

Record 297 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.