Chamber

{
  "id": "MLC-T-SEM-000052",
  "term": "Chamber",
  "field": "Semiconductors",
  "definition": "An enclosed, controlled environment within a semiconductor processing tool where a specific manufacturing step, such as deposition, etching, or ion implantation, occurs. The chamber isolates the wafer from the outside atmosphere, allowing for precise control of pressure, temperature, and gas composition. Process chambers are constructed from materials like stainless steel or aluminum and are designed to maintain high-vacuum conditions.",
  "subject": "Equipment & Automation",
  "url": "https://mlchart.com/terminology/semiconductors/chamber/"
}