MLchartDataset catalogue

Foreline

Term · Semiconductors · MLC-T-SEM-000139

A vacuum line connecting a high vacuum pump, such as a turbomolecular pump, to a roughing pump or backing pump. This line allows the roughing pump to reduce the pressure in the high vacuum pump's exhaust to a level where it can operate effectively. The foreline typically operates in the medium vacuum range, from atmospheric pressure down to approximately 10^-3 Torr.

Table 1. Record
IdentifierMLC-T-SEM-000139
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000139",
  "term": "Foreline",
  "field": "Semiconductors",
  "definition": "A vacuum line connecting a high vacuum pump, such as a turbomolecular pump, to a roughing pump or backing pump. This line allows the roughing pump to reduce the pressure in the high vacuum pump's exhaust to a level where it can operate effectively. The foreline typically operates in the medium vacuum range, from atmospheric pressure down to approximately 10^-3 Torr.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/foreline/"
}

Record 138 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.