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Ion gauge

Term · Semiconductors · MLC-T-SEM-000181

A vacuum gauge that measures very low pressures by ionizing gas molecules and measuring the resulting ion current. Hot cathode ion gauges use a heated filament to emit electrons, while cold cathode gauges use a strong electric field. These gauges are typically used for pressures below 10^-3 Torr, extending into the ultra-high vacuum range.

Table 1. Record
IdentifierMLC-T-SEM-000181
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000181",
  "term": "Ion gauge",
  "field": "Semiconductors",
  "definition": "A vacuum gauge that measures very low pressures by ionizing gas molecules and measuring the resulting ion current. Hot cathode ion gauges use a heated filament to emit electrons, while cold cathode gauges use a strong electric field. These gauges are typically used for pressures below 10^-3 Torr, extending into the ultra-high vacuum range.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/ion-gauge/"
}

Record 184 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.