MLchartDataset catalogue

Cryopump

Term · Semiconductors · MLC-T-SEM-000076

A vacuum pump that captures and removes gas molecules by condensing or adsorbing them onto a very cold surface. The pump creates a high vacuum by lowering the temperature of internal surfaces, called cryopanels, to below 120 K using a closed-loop helium refrigerator. Cryopumps are used in high-vacuum process chambers for applications like physical vapor deposition, where they effectively pump water vapor.

Table 1. Record
IdentifierMLC-T-SEM-000076
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000076",
  "term": "Cryopump",
  "field": "Semiconductors",
  "definition": "A vacuum pump that captures and removes gas molecules by condensing or adsorbing them onto a very cold surface. The pump creates a high vacuum by lowering the temperature of internal surfaces, called cryopanels, to below 120 K using a closed-loop helium refrigerator. Cryopumps are used in high-vacuum process chambers for applications like physical vapor deposition, where they effectively pump water vapor.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/cryopump/"
}

Record 71 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.