Process cooling water

{
  "id": "MLC-T-SEM-000265",
  "term": "Process cooling water",
  "field": "Semiconductors",
  "definition": "A closed-loop system of temperature-controlled deionized water, or PCW, used to remove heat from semiconductor manufacturing equipment. This water circulates through heat exchangers within process tools, such as etchers and deposition chambers, to maintain stable operating temperatures required for consistent results. The PCW itself is cooled by a separate facilities-side heat exchanger, which transfers the heat to an external chilled water supply or cooling tower.",
  "abbreviation": "PCW",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/process-cooling-water/"
}