Evaporation

{
  "id": "MLC-T-SEM-000374",
  "term": "Evaporation",
  "field": "Semiconductors",
  "definition": "A physical vapor deposition method for depositing thin films onto a substrate by heating a source material in a high-vacuum environment until it vaporizes. The gaseous atoms or molecules then travel in a straight line and condense on the cooler substrate surface. Unlike sputtering, evaporation is a lower-energy process, resulting in less substrate damage but potentially poorer film adhesion and step coverage.",
  "subject": "Deposition, Etch & Clean",
  "url": "https://mlchart.com/terminology/semiconductors/evaporation/"
}