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Capacitance manometer

Term · Semiconductors · MLC-T-SEM-000048

A type of vacuum gauge used in semiconductor processing to precisely measure absolute pressure, independent of gas composition. It operates by detecting changes in capacitance between a fixed electrode and a flexible diaphragm that deflects with pressure variations. These gauges are highly accurate for pressures ranging from atmospheric down to very low vacuum levels, typically in the millitorr to torr range.

Table 1. Record
IdentifierMLC-T-SEM-000048
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000048",
  "term": "Capacitance manometer",
  "field": "Semiconductors",
  "definition": "A type of vacuum gauge used in semiconductor processing to precisely measure absolute pressure, independent of gas composition. It operates by detecting changes in capacitance between a fixed electrode and a flexible diaphragm that deflects with pressure variations. These gauges are highly accurate for pressures ranging from atmospheric down to very low vacuum levels, typically in the millitorr to torr range.",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/capacitance-manometer/"
}

Record 40 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.