Point of use abatement

{
  "id": "MLC-T-SEM-000255",
  "term": "Point of use abatement",
  "field": "Semiconductors",
  "definition": "A system installed directly at the exhaust of a semiconductor process tool to treat hazardous or environmentally harmful gases before they enter the facility's main exhaust system. This localized treatment prevents the accumulation of dangerous byproducts and reduces the load on central abatement systems. POU abatement methods include combustion, plasma, and wet scrubbing.",
  "abbreviation": "POU",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/point-of-use-abatement/"
}