MLchartDataset catalogue

Wet bench

Term · Semiconductors · MLC-T-SEM-000359

A piece of equipment used in semiconductor manufacturing for processes that involve liquid chemicals, such as cleaning, etching, and developing. It typically consists of a series of tanks or baths where wafers are immersed in different solutions. These systems are designed to handle hazardous chemicals safely and precisely control process parameters like temperature and chemical concentration.

Table 1. Record
IdentifierMLC-T-SEM-000359
FieldSemiconductors
SubjectDeposition, Etch & Clean
Record as JSON 
{
  "id": "MLC-T-SEM-000359",
  "term": "Wet bench",
  "field": "Semiconductors",
  "definition": "A piece of equipment used in semiconductor manufacturing for processes that involve liquid chemicals, such as cleaning, etching, and developing. It typically consists of a series of tanks or baths where wafers are immersed in different solutions. These systems are designed to handle hazardous chemicals safely and precisely control process parameters like temperature and chemical concentration.",
  "subject": "Deposition, Etch & Clean",
  "url": "https://mlchart.com/terminology/semiconductors/wet-bench/"
}

Record 379 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.