MLchartDataset catalogue

High Efficiency Particulate Air filter

Term · Semiconductors · MLC-T-SEM-000160

A type of pleated mechanical air filter, known as a HEPA filter, that removes airborne particles to maintain the extreme cleanliness required in a fabrication plant's cleanroom. It works by forcing air through a fine mesh that traps particles via diffusion, interception, and impaction. To qualify as HEPA, a filter must remove at least 99.97% of airborne particles with a size of 0.3 micrometers, the most penetrating particle size.

Table 1. Record
IdentifierMLC-T-SEM-000160
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
AbbreviationHEPA
Record as JSON 
{
  "id": "MLC-T-SEM-000160",
  "term": "High Efficiency Particulate Air filter",
  "field": "Semiconductors",
  "definition": "A type of pleated mechanical air filter, known as a HEPA filter, that removes airborne particles to maintain the extreme cleanliness required in a fabrication plant's cleanroom. It works by forcing air through a fine mesh that traps particles via diffusion, interception, and impaction. To qualify as HEPA, a filter must remove at least 99.97% of airborne particles with a size of 0.3 micrometers, the most penetrating particle size.",
  "abbreviation": "HEPA",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/high-efficiency-particulate-air-filter/"
}

Record 161 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.