Airborne molecular contamination

{
  "id": "MLC-T-SEM-000018",
  "term": "Airborne molecular contamination",
  "field": "Semiconductors",
  "definition": "The presence of gaseous chemical contaminants in a cleanroom environment that can adversely affect semiconductor manufacturing processes and device performance. Unlike particulate contamination, airborne molecular contamination (AMC) consists of individual molecules originating from sources like process chemicals, outgassing from materials, and personnel. AMC is classified into acids, bases, condensables, and dopants, with concentrations measured in parts per trillion (ppt) or parts per billion (ppb) using specialized analytical instruments.",
  "abbreviation": "AMC",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/airborne-molecular-contamination/"
}