MLchartDataset catalogue

Airlock

Term · Semiconductors · MLC-T-SEM-000019

A sealed chamber with two interlocking doors, designed to maintain pressure differentials and prevent the ingress of contaminants between areas of different cleanliness levels. Personnel or materials enter one door, which then closes before the second door opens to the next area. This system minimizes particle transfer into sensitive manufacturing environments.

Table 1. Record
IdentifierMLC-T-SEM-000019
FieldSemiconductors
SubjectCleanroom, Contamination & EHS
Record as JSON 
{
  "id": "MLC-T-SEM-000019",
  "term": "Airlock",
  "field": "Semiconductors",
  "definition": "A sealed chamber with two interlocking doors, designed to maintain pressure differentials and prevent the ingress of contaminants between areas of different cleanliness levels. Personnel or materials enter one door, which then closes before the second door opens to the next area. This system minimizes particle transfer into sensitive manufacturing environments.",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/airlock/"
}

Record 11 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.