MLchartDataset catalogue

Alignment mark

Term · Semiconductors · MLC-T-SEM-000020

A precisely patterned feature on a semiconductor wafer or photomask used to accurately position successive layers during fabrication. These marks are typically geometric shapes, such as crosses or boxes, that are optically or electronically detected. Proper alignment of these marks is necessary to achieve the precise overlay required for functional integrated circuits.

Table 1. Record
IdentifierMLC-T-SEM-000020
FieldSemiconductors
SubjectLithography & Patterning
Record as JSON 
{
  "id": "MLC-T-SEM-000020",
  "term": "Alignment mark",
  "field": "Semiconductors",
  "definition": "A precisely patterned feature on a semiconductor wafer or photomask used to accurately position successive layers during fabrication. These marks are typically geometric shapes, such as crosses or boxes, that are optically or electronically detected. Proper alignment of these marks is necessary to achieve the precise overlay required for functional integrated circuits.",
  "subject": "Lithography & Patterning",
  "url": "https://mlchart.com/terminology/semiconductors/alignment-mark/"
}

Record 12 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.