MLchartDataset catalogue

Outgassing

Term · Semiconductors · MLC-T-SEM-000236

The release of gas from a material, often occurring under vacuum conditions or elevated temperatures. This phenomenon happens when trapped or absorbed gases within a solid material escape into the surrounding environment. In semiconductor manufacturing, outgassing can introduce contaminants into process chambers, affecting device performance and yield.

Table 1. Record
IdentifierMLC-T-SEM-000236
FieldSemiconductors
SubjectCleanroom, Contamination & EHS
Record as JSON 
{
  "id": "MLC-T-SEM-000236",
  "term": "Outgassing",
  "field": "Semiconductors",
  "definition": "The release of gas from a material, often occurring under vacuum conditions or elevated temperatures. This phenomenon happens when trapped or absorbed gases within a solid material escape into the surrounding environment. In semiconductor manufacturing, outgassing can introduce contaminants into process chambers, affecting device performance and yield.",
  "subject": "Cleanroom, Contamination & EHS",
  "url": "https://mlchart.com/terminology/semiconductors/outgassing/"
}

Record 242 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.