Fan filter unit

{
  "id": "MLC-T-SEM-000129",
  "term": "Fan filter unit",
  "field": "Semiconductors",
  "definition": "A self-contained module consisting of a fan, motor, and a high-efficiency particulate air (HEPA) or ultra-low particulate air (ULPA) filter. These units are installed in cleanroom ceilings to supply filtered air, maintaining the required cleanliness levels for semiconductor manufacturing. They operate by drawing air from the plenum above and discharging it downwards into the cleanroom space.",
  "abbreviation": "FFU",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/fan-filter-unit/"
}