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Vibration isolation

Term · Semiconductors · MLC-T-SEM-000346

The practice of mitigating mechanical vibrations that can interfere with sensitive semiconductor manufacturing processes, particularly lithography and metrology. This involves using specialized damping systems, air springs, or active feedback mechanisms to decouple equipment from floor vibrations. Vibration levels in advanced fabrication facilities are often specified in nanometers per second root mean square (RMS).

Table 1. Record
IdentifierMLC-T-SEM-000346
FieldSemiconductors
SubjectFacilities, Vacuum & Chemicals
Record as JSON 
{
  "id": "MLC-T-SEM-000346",
  "term": "Vibration isolation",
  "field": "Semiconductors",
  "definition": "The practice of mitigating mechanical vibrations that can interfere with sensitive semiconductor manufacturing processes, particularly lithography and metrology. This involves using specialized damping systems, air springs, or active feedback mechanisms to decouple equipment from floor vibrations. Vibration levels in advanced fabrication facilities are often specified in nanometers per second root mean square (RMS).",
  "subject": "Facilities, Vacuum & Chemicals",
  "url": "https://mlchart.com/terminology/semiconductors/vibration-isolation/"
}

Record 365 of 390 in Semiconductors terminology (MLC-0108). Request the full dataset.